CTIA's Tungsten Heater in Atomic Layer Deposition (ALD)
CTIA's tungsten heater is a resistive heating element used in Atomic Layer Deposition (ALD) equipment to provide stable, uniform substrate heating and thermal field control for processes such as ultra-thin film deposition, nanomaterial growth, and precision semiconductor fabrication. Manufactured from high-purity tungsten wire through multiple precision processing and structural forming stages, tungsten heating element is widely utilized in semiconductor manufacturing equipment, photoelectric material deposition systems, and research thin-film preparation devices.
Heating elements must achieve precise temperature control and long-term stable operation under high vacuum or reactive atmospheres within the ALD process environment. CTIA's tungsten heater offers several technical advantages:
(1) High structural stability at elevated temperatures prevents deformation, supported by a melting point of 3410 degrees Celsius.
(2) Reaction chamber cleanliness is maintained through low vapor pressure and minimal volatilization.
(3) Efficient electrical-to-thermal energy conversion and uniform radiant thermal fields are ensured by stable resistive performance.
(4) Process repeatability and film consistency are improved by a low coefficient of thermal expansion, which minimizes deformation during repeated heating and cooling cycles.
Specifications of CTIA’s Tungsten Heater
(1) Material: Pure tungsten wire (purity ≥99.95%) or doped tungsten wire
(2) Wire diameter: 0.2~1.2 mm, customizable
(3) Strands: Single strand or multi-strand stranding
(4) Geometry: Straight, spiral, U-frame, and customized shapes
(5) Surface: Electrolytic polishing, alkaline cleaning, or stress-relief cleaning
CTIA GROUP has long focused on tungsten heater manufacturing. Based on chamber structure, process temperature zones, and deposition uniformity requirements of ALD equipment, CTIA optimizes tungsten wire diameter, doping type and content, structural parameters, effective heating length, and lead structure. Surface treatments such as electrolytic polishing and alkaline cleaning are available, enabling full-process customized solutions from material selection and structural design to precision manufacturing.
For any inquiry, please contact tungsten heater manufacturer: CTIA GROUP
Email: sales@chinatungsten.com
Tel: 0086 592 5129696 / 0086 592 5129595
Website: www.tungsten.com.cn
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