CTIA's Tungsten Heater in Chemical Vapor Deposition (CVD)
CTIA’s tungsten heater is used as a resistive heating element in Chemical Vapor Deposition (CVD) systems for stable high-temperature deposition of semiconductor films, optical coatings, and functional materials. It is manufactured from high-purity tungsten wire or doped tungsten wire through precision stranding, winding, forming, and surface treatment processes.
In high-temperature chemical vapor deposition reaction environments, heater selection directly affects deposition rate and film uniformity. CTIA’s tungsten heater features the following characteristics to meet the requirements:
(1) High temperature resistance: With a melting point of about 3410℃, it maintains structural stability during long-term high-temperature operation.
(2) Low contamination: Low vapor pressure reduces volatilization in reactive atmospheres, helping maintain chamber cleanliness.
(3) Thermal stability: A low thermal expansion coefficient minimizes deformation during heating and cooling cycles, ensuring good structural stability.
(4) Uniform heating: Stable electrical resistivity enables continuous radiative heating and improves temperature consistency.
Specifications of CTIA GROUP’s Tungsten Heater
(1) Material: High-purity tungsten wire or doped tungsten wire
(2) Wire diameter: 0.2~1.2 mm, customizable
(3) Structure: Single strand or multi-strand twisted
(4) Shape: Hump, funnel, coil, straight bar, U-frame, and customized geometries
Tungsten heater is widely used in CVD reactor heating systems to provide a stable thermal environment for silicon-based, carbon-based, and metal compound film deposition, supporting processes such as semiconductor epitaxial growth, optical coating, hard coating, and functional material deposition.
CTIA GROUP has over 30 years of experience in tungsten heater manufacturing. Based on reactor chamber structure and process temperature requirements, CTIA optimizes tungsten wire diameter, doping type, structural configuration, effective heating length, and lead structure. Surface treatments such as electrolytic polishing and alkaline cleaning are available, enabling customized solutions from material selection to structural fabrication.
For any inquiry, please contact tungsten heater manufacturer: CTIA GROUP
Email: sales@chinatungsten.com
Tel: 0086 592 5129696 / 0086 592 5129595
Website: www.tungsten.com.cn
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