CTIA's Tungsten Heater in Electron Beam Evaporation Source
CTIA’s tungsten heater is used as an electron beam evaporation source for the evaporation of high-melting-point metals and compound materials. The resistive heating component is manufactured from high-purity tungsten wire or doped tungsten wire through precision stranding, winding, forming, and surface treatment processes, and is integrated into electron gun evaporation systems as a heating unit. Tungsten heating element is widely used in high-precision vacuum deposition for optical coating, integrated circuit metallization, and aerospace coatings.
Why Choose Tungsten Heaters for Electron Beam Evaporation?
The performance of the heating element directly relates to the temperature field distribution of the electron gun system and the stability of the electron beam. Tungsten has a high melting point of 3410 degrees Celsius, allowing it to maintain structural strength in the high temperature environment required for electron beam evaporation, avoiding softening or deformation. In ultra-high vacuum environments, the vapor pressure of tungsten is very low, and the volatilization of the material itself is minimal, effectively meeting the strict requirements for film purity in electron beam evaporation and reducing the impact of impurities on precision film layers. Furthermore, tungsten possess stable resistive performance and good thermal conductivity, enabling rapid thermal support after electrification and adjusting temperature field distribution through thermal radiation, which helps film materials achieve stable evaporation and improves film uniformity. So, tungsten heater is widely applied as an electron beam evaporation source.
Specifications of CTIA's Tungsten Heater
(1) Material: Pure tungsten (purity ≥99.95%) or doped tungsten wire.
(2) Wire Diameter: 0.2~1.2mm, customizable.
(3) Strands: Single strand, 2-strand, 3-strand, and 4-strand stranding, etc.
(4) Geometry: U-frame, funnel, straight bar, wave, or custom structures.
Applications of CTIA's Tungsten Heaters in Electron Beam Evaporation
(1) Precision optical coating: Used to assist electron beam evaporation of fluorides or oxides, ensuring the thickness accuracy of optical filters and anti-reflective coatings.
(2) Integrated circuit manufacturing: Used for vacuum evaporation deposition of conductive metal layers and liner layers, meeting high cleanliness requirements in semiconductor processes.
(3) Semiconductor devices: Used for heating and evaporating refractory metal materials to form uniform metallized contact layers on wafer surfaces.
(4) Aerospace functional coatings: Used for auxiliary heating of high-performance thermal barrier coatings and anti-corrosion thin films, ensuring the adhesion of large area coatings.
(5) Material research: Used in laboratory electron beam evaporation systems for research experiments in preparing ultra-thin metal films and nanometer scale multilayer films.
CTIA GROUP has over 30 years of experience in tungsten heater manufacturing. Based on electron beam evaporation crucible layout, coating material properties, and thermal field requirements, CTIA optimizes tungsten wire diameter, doping type, structure, effective heating length, and lead design. Surface treatments such as electrolytic polishing and alkaline cleaning are applied to ensure full-process customization from material selection to precision manufacturing.
For any inquiry, please contact tungsten heater manufacturer: CTIA GROUP
Email: sales@chinatungsten.com
Tel: 0086 592 5129696 / 0086 592 5129595
Website: www.tungsten.com.cn
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4. Stranded tungsten wire for making tungsten heater