CTIA's Tungsten Heater in Plasma-Enhanced Chemical Vapor Deposition (PECVD)
CTIA’s tungsten heater is used as a resistive heating element in Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment to provide stable substrate heating and an auxiliary thermal field for thin film deposition and material modification. Manufactured from tungsten wire with a purity exceeding 99.95% through precision stranding, coiling, pressing, and surface treatment, the tungsten heating element is essential for process systems involving semiconductor thin film deposition, insulation layer preparation, functional coating, and material surface modification.
PECVD processes require stable, uniform heating under plasma conditions. CTIA’s tungsten heater offers the following advantages:
(1) High melting point of about 3410℃ ensures structural stability under continuous heating and plasma exposure.
(2) Low vapor pressure in vacuum and reactive atmospheres reduces volatilization and contamination risk.
(3) Stable electrical resistivity enables efficient conversion of electrical energy into heat, forming a uniform radiative thermal field.
(4) Low thermal expansion coefficient minimizes deformation during thermal cycling, supporting stable process operation.
Specifications of CTIA's Tungsten Heater
(1) Material: Pure tungsten wire or doped tungsten wire
(2) Wire diameter: 0.2~1.2 mm
(3) Strand structure: Single strand or multi-strand twisted
(4) Geometry: Straight, U-frame, spiral, coil, and customized shapes
(5) Surface: Electrolytic polishing or alkaline cleaning
CTIA GROUP has over 30 years of experience in tungsten heater manufacturing. Based on chamber structure, plasma distribution, and thermal field requirements of PECVD equipment, CTIA optimizes tungsten wire diameter, doping type and content, structural configuration, effective heating length, and lead structure. Surface treatments such as electrolytic polishing and alkali cleaning are available, enabling full-process customized solutions from material selection and structural design to precision manufacturing.
For any inquiry, please contact tungsten heater manufacturer: CTIA GROUP
Email: sales@chinatungsten.com
Tel: 0086 592 5129696 / 0086 592 5129595
Website: www.tungsten.com.cn
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