What Is Thermal Evaporation Tungsten Heater?
Thermal evaporation tungsten heater, also known as tungsten evaporation heater, is a high-temperature resistive heating element specially used in vacuum thermal evaporation coating equipment. It is essentially a specialized application of tungsten heater in the PVD (Physical Vapor Deposition) thermal evaporation process. Its core function is not simply heating, but serving as an evaporation source that heats coating materials to the molten or vaporized state, allowing vapor flux to form and deposit onto the substrate surface under high-vacuum conditions.
CTIA’s thermal evaporation tungsten heater is typically installed in the evaporation source area of coating equipment. During operation, high current passes through tungsten wire, stranded tungsten wire, tungsten basket or tungsten boat structures, generating rapid heating through resistance heating. Tungsten has a melting point of approximately 3420°C and extremely low vapor pressure at elevated temperatures, enabling stable operation within the 1500–3000°C range while minimizing contamination to deposited films. This is one of the main reasons why tungsten has become the mainstream heating material in thermal evaporation systems.
Compared with conventional high-temperature heating elements, thermal evaporation tungsten heater focuses more on evaporation efficiency and film purity rather than long-term constant-temperature heating. Temperature must rise rapidly within a short period while maintaining a stable evaporation rate; otherwise, film thickness uniformity, deposition rate and film density may be directly affected. Temperature fluctuation is especially critical in optical coating and semiconductor metallization processes, where film performance is highly sensitive to thermal stability.
The structure of tungsten heater is generally designed according to the form of evaporation materials. Tungsten baskets and tungsten boats are commonly used for granules, pellets or bulk materials, while stranded tungsten wire, helical tungsten wire and point-source evaporation structures are more suitable for fine wire, thin foil or small-dose precision evaporation applications.
Common thermal evaporation tungsten heater structures include tungsten twisted wire heaters, tungsten evaporation coils, tungsten baskets, tungsten boats, U-shape tungsten heaters and hump-shaped tungsten heaters.Among them, stranded tungsten wire and tungsten coils are widely used because they provide more uniform heating, better anti-sag performance and stronger adaptability to frequent start-stop operating conditions.
CTIA’s thermal evaporation tungsten heaters are mainly used in high-value thin film manufacturing fields, including optical reflective coatings and anti-reflection coatings, semiconductor electrode metallization, OLED (Organic Light-Emitting Diode) and display electrode evaporation, laboratory thermal evaporation of gold, silver and aluminum, as well as decorative vacuum coating.Thermal evaporation tungsten heater is considered a standard heating component for depositing low- to medium-evaporation-temperature metals such as gold, silver, aluminum and chromium.
CTIA GROUP customizes and optimizes tungsten heater designs according to evaporation material type, target film thickness, equipment power and vacuum chamber dimensions.Optimization parameters include tungsten wire diameter, strand number, twisting pitch, effective evaporation zone length and terminal conductive structure to achieve an optimal balance among heating rate, evaporation stability and service life.
For any inquiry, please contact tungsten heater manufacturer: CTIA GROUP
Email: sales@chinatungsten.com
Tel: 0086 592 5129696 / 0086 592 5129595
Website: www.tungsten.com.cn
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1.Tungsten heater quotation table
2. Catalog of tungsten heater
3. Tungsten heater models
4. Stranded tungsten wire for making tungsten heater